Design and fabrication of two-axis micromachined steel scanners
نویسندگان
چکیده
منابع مشابه
Design and fabrication of two-axis micromachined steel scanners
This paper presents the fabrication and the test results of two-axis micromachined micro-mirror steel scanners developed for display and imaging applications. The novel fabrication method uses the conventional lithography and electrochemical metal etching techniques. A single photomask is used to define the whole structure, resulting in a simple and inexpensive fabrication process. Two differen...
متن کاملTwo-axis MEMS scanners with radial vertical combdrive actuators—design, theoretical analysis, and fabrication
We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation....
متن کاملDesign and Fabrication of Micromachined Resonators
Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysili...
متن کاملPhotonic Micromachined Devices – Design, fabrication and experiment
Jury Yong CHEN, Directeur de Recherches, ENS Paris Rapporteur Christophe GORECKI , Directeur de Recherches, FEMTO-ST Besançon Rapporteur Yamin LEPRINCE, Professeur, UPEMLV, Marne-la-Vallée Examinateur Bassam SAADANY, Chef du département MEMS, Si-Ware-Systems Examinateur Tarik BOUROUINA, Professeur, ESIEE Paris Examinateur Ai-Qun LIU, Professeur, Nanyang Technological University, Singapour Exami...
متن کاملDesign, Fabrication and Levitation Experiments of a Micromachined Electrostatically Suspended Six-Axis Accelerometer
A micromachined electrostatically suspended six-axis accelerometer, with a square plate as proof mass housed by a top stator and bottom stator, is presented. The device structure and related techniques concerning its operating principles, such as calculation of capacitances and electrostatic forces/moments, detection and levitation control of the proof mass, acceleration measurement, and struct...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2009
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/19/7/075001